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Contact Us
Jiangsu Ziheng Electronic Technology Co., Ltd.
Telephone
0086-18551316879
Mailbox
rosebian@zenithpfa.com
Lilywang@zenithpfa.com
Address
Weilu Building, No.8 Yanzheng West Avenue, Wujin District, Changzhou City, Jiangsu Province
The series of ductless air purifying fume hoods are designed specifically to protect the safety of laboratory personnel during experimental operations. They can prevent operators from inhaling toxic, harmful, pathogenic or unknown toxic chemicals during experiments, and efficiently purify the air inside the fume hood and laboratory.
Comprehensive solution for chemical plating equipment and chemical solution process
Wafer size: 240mm Equipment configuration: 8-12 tanks, 2-6 robots (customizable) can be equipped with advanced ultrasonic waves, megasonic waves, and tank overheating protection. Each module is equipped with leakage sensors and multi-level Wafer protection measures, supporting chemical liquid CCSS/LCSS; Automatic acid replacement, automatic liquid replenishment, and preparation (compatible with various concentration ratios); Advanced Marangoni drying; Heating control, concentration control, flow control, pressure control; Chemical liquid/water, direct discharge&recovery Reliability performance: Uptime ≥ 98% Breakage ≤ 1/100000 MTBF ≥ 650 hours MTTR ≤ 3 hours Software control: PC+PLC+GUI control, supporting functions such as Schedule, EAP, FDC, etc
CDS chemical distribution system
Equipment advantages Perfect performance Easy to install Minimum maintenance requirements
Product features: Third generation cleaning equipment for 2-12 inch wafers Suitable for various material boxes, including PP, PVD Multiple design modes such as front loading/unloading, front loading/unloading, etc Standard Factory Hot Air Dry Quantity Hot CDA, N2 drying optional Standard DIW cleaning container Minimum footprint design for cleanroom Design for maximizing production capacity Strong technical support and complete spare parts Low maintenance cost and low failure rate Manual retrieval and placement of boxes, can be designed according to customer requirements Automated washing and drying, one click start
Product features: Size: Suitable for 4-8 inches Maximum speed: 1000 rpm Material: The part in contact with the liquid is made of 316L stainless steel Vibration: Use a professional dynamic balance instrument for debugging under different working conditions, with low vibration. Optional automatic adjustment of dynamic balance function. Drying efficiency: The structural design of the rectifier plate and chamber conforms to aerodynamics, improving drying efficiency. Nitrogen heating can be optionally installed. Configuration: Standard ion generator and ULPA filter across the entire series
Product features: Suitable for use in universities, research institutes, and laboratories Unique advantage: compatible rotor Unique design allows for wafer conversion of different sizes without the need for rotor replacement
Jiangsu Zenith Electronic Technology Co., Ltd.
Weilu Building, No.8 Yanzheng West Avenue, Wujin District, Changzhou City, Jiangsu Province